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Royce

Royce Lab Items.

Electron-Beam Lithography
(Royce EBL Suite, Class 100 CGC Cleanroom)


Model: EBPG 5200, Raith GMBH

(will be available in December 2017)


A state-of-the-art high-resolution/throughput Electron-Beam Lithography system capable of exposing 8-inch waters.

Starlab
(Lab 31)


MVG, range 650 to 18 000 MHz

Avalable now


StarLab is the ultimate tool for antenna pattern measurements in laboratories and production environments where space is limited, cost is critical, and the flexibility of a portable system is required.

Probe Station
(Lab 32)


Model: Summit 12000, Cascade Microtech

Avalable now


Precise On-Wafer Device and Process Characterization, on a vibration isolation table.