skip to primary navigationskip to content

CGC Class 100 Cleanroom

Below, you can find the list of equipment available in Class 100 Cleanroom. A few are already available for use, others are being installed and will become available later.

Please use the booking system to use the equipment.


Electron-Beam Lithography (Royce EBL Suite)

Model: EBPG 5200, Raith GMBH

(will be available in December 2017)

A state-of-the-art high-resolution/throughput Electron-Beam Lithography system capable of exposing 8-inch waters.

Laser Writer

Model: LW-405B+, Microtech Srl

Available for use.

Used for the direct-write contactless optical lithography. Available wavelengths: 385 and 405nm. Best resolution (linewidth) is 0.6micron.


Model: Obducat Eitre 6 with UV curing option.

Will be available in August 2017.


The tool is used for high resolution nanoimprinting. 

Resist Preparation wetbench

The wetbench is equipped with three spinners and four precision hotplates from EMS.

Available for use.


Processes available:

- SU-8 negative photo-resists

- AZ/LOR positive and negative photo-resists

- PMMA/ZEP e-beam resists

Development and Cleaning wetbench

This wetbench is used for preparation of samples for lithography, as well post-processing (development, etc.)

Available for use.

HF Acid bench

Triple Furnace

The tool is used for deep oxidation of Si

Will be available for use in September 2017.


When in the Cleanroom, please follow the local rules.


RSS Feed Latest news

Dr Luigi Occhipinti joins the Cambridge Graphene Centre

Mar 14, 2018

The Cambridge Graphene Centre welcomes Dr Luigi Occhipinti as Deputy Director and Chief Operating Officer.

CDT Graphene Technology Summer Conference

Apr 20, 2017

Registration is now open for the student-led Graphene Technology Summer Conference, taking place 12-15 June 2017 at Wyboston Lakes.

Presentation Prize for Tian Carey

Jan 17, 2017

CDT student Tian Carey was awarded a prize for his presentation given at the annual IOP Printing and Graphic Science Group Student Conference.

Environmentally-friendly graphene textiles could enable wearable electronics

Nov 25, 2016

A new method for producing conductive cotton fabrics using graphene-based inks opens up new possibilities for flexible and wearable electronics, without the use of expensive and toxic processing steps.

Single Photon Light Emitting Diodes for On-Chip Integration

Sep 27, 2016

Researchers from the Cambridge Graphene Centre and Cavendish Laboratory use layered materials to create an all-electrical quantum light emitting diodes (LED) with single-photon emission. These LEDs have potential as on-chip photon sources in quantum information applications.

View all news